Used KLA / TENCOR FLX-5400 #293648854 for sale
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ID: 293648854
Wafer Size: 8"
Vintage: 2015
Thin film stress measurement system, 8"
2015 vintage.
KLA / TENCOR FLX-5400 is a state-of-the-art wafer testing and metrology equipment that provides accuracy and high throughput performance at the nanoscale. It effectively identifies particles and defects in floating substrates, including photomasks and flat panel displays. The system is designed to test at smaller measurement cycles and can identify defects 50X faster than a conventional unit. KLA FLX-5400 uses advanced high-resolution imaging technology to measure particles and defect-prone regions on substrates. It incorporates automated particle-detection algorithms to identify and autofocus on these regions in order to determine their size, shape, and location. Additionally, the machine includes powerful analytics capabilities to track and report on individual wafer measurements. The tool uses a combination of optical and acoustic techniques to precisely identify particles on the wafer. It incorporates a sensor array with advanced algorithms to detect particles down to 0.1 microns in size. The asset also uses optical metrology techniques, such as top-down scanning, to accurately identify particles. The model can measure particles in a wide range of materials, such as silicon, glass, and metal. It is engineered to meet the stringent requirements of high-volume wafer fabrication processes. The equipment is equipped with a precise autofocus feature that adapts to substrate topography variation. This feature helps to reduce particulate measurement time and increase throughput. The system is designed for 24/7 operation in Class 1 cleanroom environments. TENCOR FLX 5400 is a cost-effective solution for wafer testing and metrology needs that can easily integrate into production facilities. It is capable of testing hundreds of substrates per hour. Additionally, the unit is supported by a comprehensive suite of software, hardware, and services designed to optimize performance and yield. The machine is upgradeable with options and accessories that offer customization options.
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