Used KLA / TENCOR FLX-5400 #9031780 for sale

KLA / TENCOR FLX-5400 is a state-of-the-art wafer testing and metrology equipment designed to perform the most complex wafer testing and metrology tasks with superior accuracy and repeatability. This system is ideal for advanced nodes including 5nm applications. KLA FLX-5400 utilizes a combination of optical and digital imaging, physical measurement, and advanced process analysis capabilities to deliver highly accurate and reliable metrology and wafer test results. This unit comes integrated with the Emerge™ 5000 Advanced Metrology Platform, a flexible and open machine that allows users to select the best combination of metrology solutions based on application requirements. This platform includes a suite of high-performance process analysis tools such as rapid defect review, track analysis, and characterization, all with an ultra-low detection threshold and unprecedented spatial resolution. The tool's Automation and Robotics technology enables cost-effective automation of high-volume, repetitive metrology and wafer testing tasks, enabling highly repeatable and reliable results. The asset incorporates high-precision dynamic focus controls which allows for continuous fast adaptive focusing and image acquisition. It also includes a selection of adaptive optical and digital imaging technologies and integrated AFM/SPM capabilities for versatile defect imaging and analysis. For physical measurement, the model is integrated with world-leading metrology tools that include Eddy-Current critical dimension, Focus/Defocus, etch-depth, and layer/film thickness metrology capabilities. TENCOR FLX 5400 offers a powerful toolbox for process fault detection and analysis, which includes SEM images of the wafer and/or die for fast fine-grained fault diagnosis, real-time data analytics to correlate process and product metrics with test results, and statistical process control for automated fault detection and classification. Finally, the equipment comes with a wide range of advanced reporting and data export options to enable the sharing of data and test results with upstream and downstream integration partners with accuracy and confidence. The user can easily configure a range of reporting options, including role-based access control for secure and granular access to data. This state-of-the-art wafer testing and metrology system is the ultimate diagnostic tool for advanced nodes etc.