Used KLA / TENCOR FLX-5400 #9271456 for sale

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ID: 9271456
Thin film stress measurement system.
KLA / TENCOR FLX-5400 is a high-precision wafer testing and metrology equipment designed specifically for the semiconductor industry. It can be used to test various parameters of wafer substrates such as die thickness, die bond pad size, and die flatness, as well as detect and measure defects in both bulk and thin film structures. KLA FLX-5400 utilizes variable motion kinematics to accurately capture wafer data quickly and efficiently. This technology also allows for the precise measurement of critical features on modern diesets such as chip and substrate design features and bond pad dimensions. TENCOR FLX 5400 is a highly reliable wafer testing and metrology system. Its advanced algorithms, nanometer encoders, and motion control capabilities enable it to accurately analyze and measure the integrity of wafers. It can detect and measure the smallest feature dimensions and defects on the most critical structures, such as transistors and memory cells. The unit includes an automated data handling machine to quickly store, analyze, and report measured wafer data. The tool has a 4.5μm resolution that allows for the study of the integrity of small features on the wafer. Its integrated imaging asset can capture high-resolution images over the entire wafer area, allowing for the study of various material structures and defects. The imaging model utilizes a high-resolution digital imaging head coupled with a specialized laser illumination and auto-focusing optics. The equipment also includes powerful software-based tools for data analysis and reporting. The tools can automatically generate bar graphs and histograms to quickly visualize wafer data as well as detect outlier spots. The software can also compare multiple wafer images and measure defect density. FLX 5400 offers the highest level of wafer testing and metrology capabilities within an industry-standard machine. Its superior performance and reliable operation make it an ideal solution for semiconductor manufacturing.
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