Used KLA / TENCOR FLX-5400 #9299886 for sale

KLA / TENCOR FLX-5400 is an advanced wafer testing and metrology equipment that enables users to achieve unprecedented precision and productivity for pattering, measuring, and inspecting semiconductor materials. It features an ultra-high resolution, rapid XY scanning system, automated wafer handling, a versatile Z stage, and high-precision optical elements coupled with advanced software algorithms for accurate and reliable patterning and metrology. KLA FLX-5400 is capable of testing and measuring a wide range of materials, including SOI, strained silicon, polysilicon, silicon nitride, and other ultra-thin films. It provides antireflective coating and clear imaging for high contrast operation. Furthermore, its rapid XY scanning unit allows for fast lateral and transverse motion, enabling throughput of up to 6 wafers per hour. The robust Z stage is driven by a low-noise, high-precision linear motor stage and is reliably stable over a wide temperature range. This ensures consistent repeatability over the entire height range. The Z stage also offers low-actuation force, with a minimum step size of less than 1 nm. TENCOR FLX 5400 features an ultra-high resolution optical imaging machine with dual-axis alignment, diffractive optics, advanced lenses, and modular design. This tool provides exceptional image resolution, with a measurement resolution of less than 0.1 µm. It also includes an Automated Sampling Asset for quick and easy sample handling. KLA FLX 5400 incorporates a variety of software tools to optimize the user experience and ensure accuracy. It includes process control software for automation of Critical Dimension (CD) measurements and automated report generation. It also features an on-board computer for automated image capture and control, and a post-processing image analysis and inspection software package. FLX 5400 is an advanced wafer testing and metrology model for applications in the semiconductor industry. It offers exceptional image resolution, rapid XY scanning, and a low-noise, high-precision Z stage for reliable repeatability and accuracy. Additionally, its advanced software tools enable process automation and optimized user experience. This makes it the perfect solution for high-precision metrology and inspection.