Used KLA / TENCOR FLX-5500 #293767103 for sale

ID: 293767103
Vintage: 2001
Thin film stress measurement system 2001 vintage.
KLA / TENCOR FLX-5500 is a wafer testing and metrology system that enables precise measurements of wafer performance. It is an integrated suite of tools that combines inspection, metrology and data collection capabilities to accurately analyze and assess the quality of semiconductor wafers. KLA FLX-5500 offers through-process optical metrology and automated laser-assisted surface inspection, giving users the ability to accurately measure features on the surface and subsurface of the wafer to a nanometer resolution. Additionally, the system has a flexible design that includes user selectable wafer loading and handling structures that can be customized to the customer's application. The integrated inspection and metrology capabilities offered by TENCOR FLX 5500 are used to assess wafer performance before and after wafer processing. The system's integrated imaging, surface and line-profile scanning capabilities make it ideal for complete wafer characterization in a variety of semiconductor process steps, including surface defect inspections, topography measurements, resistance measurements, optical die-to-die measurement, correlation between defect and device performance and more. In addition, KLA / TENCOR FLX 5500 also includes a suite of advanced software algorithms that give users the tools to accurately assess wafer performance. These algorithms include defect recognition algorithms and sophisticated physical characterization algorithms, which can be used to generate high-resolution defect data for simplified analysis. The integrated wafer-lifting station also allows for easy wafer loading and unloading, significantly improving throughput times and productivity. Overall, FLX 5500 is the complete solution for semiconductor wafer testing and metrology. With its integrated suite of intelligent software algorithms, high resolution imaging capabilities, versatile wafer handling and loading, and cost-effective design, FLX-5500 is the essential tool for manufacturers of semiconductor wafers.
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