Used KLA / TENCOR FOUP Handler for SP1 / F5X / Spectra FX #9240599 for sale

ID: 9240599
Wafer Size: 12"
12".
KLA / TENCOR FOUP Handler for SP1 / F5X / Spectra FX is a modern wafer testing and metrology equipment. This system efficiently performs in-line testing and metrology of wafers, substrates, and other materials at advanced levels. KLA FOUP Handler is designed for fast and reliable analysis of photosensitive materials and other wafers such as silicon, liquid crystal display (LCD), thin film transistor (TFT) displays, and non-volatile memory (NVM). It is a full-fledged suite of automated software and hardware with precision stages, motion, vision, and imaging that meets the demands of semiconductor manufacturers. KLA FOUP Handler for SP1 / F5X / Spectra FX unit utilizes advanced proprietary optics technology to accurately analyze wafers without physical contact, minimizing damage to sensitive media. Its embedded optical sensors detect and track wafers of varying sizes and thicknesses while using thermally-strained active optics for precise angular measurements. This allows for accurate measurements at a higher framerate, bringing unprecedented metrology performance. TENCOR FOUP Handler also offers a total inspection solution, compliant with the industry standard E10/11 or equivalent EN/IEC 61215. The built-in 4M pixel, 4K resolution imaging of wafers allows for quick and reliable defect detection, including edge defects, bridge defects, round defects, scum circles, scratches, bumps, voids, and other contaminants. The imaging machine further integrates with the built-in pattern recognition and guard band auto-detection functions to assess the presence of grey defects, color defects, and wrinkle defects. KLA / TENCOR FOUP Handler's embedded signal processing capabilities give further insight into material properties. The FOUP Handler includes standard algorithms and metrology operations for critical thin/thick film measurements, color, texture, birefringence, surface coverage, depth of focus, flatness, texture, dislocation, pattern resolution, wafer flatness, material properties, image contrast, die size accuracy, and orientation. Furthermore, KLA intelligent monitoring & defect control tools enable automated metrology across wafers, while real-time data output allows users to evaluate product performance and process parameters. TENCOR FOUP Handler for SP1 / F5X / Spectra FX is an efficient, reliable, and robust tool designed for precision aliment and metrology of wafers and other sensitive substrates. It enables fast inspection and monitoring results, allowing users to carry out rapid decisions and product analysis. As a result, TENCOR FOUP Handler is an essential part of any commercial or research facility specializing in wafer testing and metrology.
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