Used KLA / TENCOR FT-500 #139119 for sale

ID: 139119
Film thickness system.
KLA / TENCOR FT-500 is a state-of-the-art wafer testing and metrology equipment, combining advanced metrology and automated testing technology with effective data management capabilities. The system offers high accuracy, fast cycle times, and an advanced user interface to enable users to work efficiently and effectively. KLA FT-500 uses real-time, fully-automatic testing, enabling it to measure a wide variety of parameters such as film thickness, doping concentration, and film stress. This is done with high repeatability and accuracy, allowing for optimum process control and process capability monitoring. Real-time analysis of measurements taken during the testing process gives feedback on the process performance and product quality, ensuring production runs are within specification. The unit also features an integrated wafer handling machine, designed for high-throughput applications. It makes use of a robotic arm to transport wafers between test sites and the data analysis station, allowing for increased productivity and reduced time spent on manual tasks. To ensure accurate measurements, the tool features advanced image processing techniques to identify defects, calculate feature dimensions, and ensure accurate positional alignment of test sites. The asset also includes an integrated control software that offers automated test parameter control, protocol data management, and various graphing and statistical analysis functions, allowing users to quickly interpret test results and make informed decisions. TENCOR FT-500 is ideal for use in both laboratory and production environments, offering a highly reliable and cost-effective solution to wafer testing and metrology applications. With its advanced capabilities, it is designed to help improve wafer yield and maximize production uptime.
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