Used KLA / TENCOR FT-600 #9081978 for sale

ID: 9081978
Film thickness system measurement mapping system.
KLA / TENCOR FT-600 is a wafer testing and metrology equipment designed for use in microelectronics fabrication. It provides advanced capabilities for measuring and analyzing a broad range of wafer properties, including electrical, optical, chemical, and thermal characteristics. The system is configurable to meet process control requirements and application-specific needs. It is designed to achieve fast, accurate, and repeatable measurements of wafers from a wide variety of materials and to rapidly characterize a wide variety of integrated circuits. The unit features a suite of high-speed naoccam cameras for imaging wafers at a nanometer-level resolution. The imaging machine can measure the electrical properties of the wafer and determine if it meets spec. Additional light sources provide optical monitoring of the wafer throughout the testing process. It includes a color-correction tool and a CCD array for three-dimensional defect detection. The asset is highly automated and can accurately interpret hundreds of test images, providing useful production information with only minimal input from the user. KLA FT-600 additionally includes a robust data handling model that can provide integrated results from multiple tests performed at a single process station. Utilizing both impedance and capacitance measurements, detailed process analysis can be performed. The equipment's onboard analysis software allows for rapid correlation of test results with specific masks, thereby facilitating process optimization. A range of chemical and thermal metrology options are available, such as an on-board mass spectrometer and an infrared temperature sensor for measuring thin films. Overall, TENCOR FT-600 is an ideal choice for electronic device fabrication requiring higher accuracy and repeatability of measurement results. It offers a comprehensive set of wafer testing and metrology capabilities, helping manufacturers of semiconductors, photovoltaics, and optoelectronics create more efficient and reliable products.
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