Used KLA / TENCOR FT-600 #9376730 for sale

KLA / TENCOR FT-600 is a fully automated wafer testing and metrology equipment designed to offer optimal reliability and accuracy in the measurement of advanced semiconductor devices. Using the latest in advanced high-resolution imaging and coating technologies, KLA FT-600 provides outstanding performance for a wide variety of metrology objectives. The system consists of two main components: the Integrated Subsystem (IS), which performs the metrology and electrical and optical measurements, and the Automated Coating Subsystem (ACS), which provides the advanced coating capabilities required for testing and metrology. The IS module includes a 40nm resolution imaging module that produces high-resolution images of wafers up to 300mm in size. Advanced algorithms are used to analyze these images to measure critical parameters such as vertical dimensional profile, surface roughness, and defect size and quantity. The unit also includes an electrical and optical sub-module, which can measure electrical parameters such as ohmic contact resistance, diode and MOSFET parameter profiles, transconductance, and other device parameter values. This sub-module also includes a spectral response measurement machine to measure optical characteristics, such as spectral reflectance and transmittance. The ACS includes an advanced magnetically levitated motor-driven coating unit that coats samples up to 300mm. This coating unit provides a smooth, even, high-precision coating of materials such as photoresists and other conformal coatings and it is fully compatible with a variety of photolithography and other wet chemical processes. The unit is also equipped with an integrated environmental and vacuum control tool to ensure optimal coating performance. In addition, TENCOR FT-600 includes an advanced software suite for the integration of all the asset components. This software suite provides process automation, yield optimization, data acquisition and analysis, report generation, and other capabilities. FT-600 is designed to meet the highest standards of quality and reliability and is suitable for a wide variety of metrology and production applications. Its advanced imaging and coating performance, combined with its robust software suite, make it an ideal solution for the demanding needs of the semiconductor industry.