Used KLA / TENCOR FT-750 #136435 for sale
Wafer Size: 8"
Film thickness measurement system, 8", 1994 vintage.
KLA / TENCOR FT-750 is a wafer testing and metrology equipment that is used to evaluate the performance of wafer chipsets. This system includes a variety of advanced testing and metrology components that are used to detect and analyze defects in integrated circuits (ICs). KLA FT-750 can be used to test, measure, and verify both pre and post-manufacturing wafer chipsets. TENCOR FT 750 features an automated high-resolution microscope for inspecting the surface of wafers, allowing operators to seamlessly zoom in on details of a sample without swapping objectives. The microscope also features an automated 6-axis positioning unit that enables operators to quickly and accurately measure and record fine features at high-precision. In addition, KLA / TENCOR FT 750 has a high-speed serial data acquisition machine that acquires and stores test data taken from the wafer samples. This tool is highly configurable and can be adapted to meet the requirements of a variety of testing applications. Furthermore, FT 750 also includes a SMARTSort technology that helps to categorize and sort defects found during testing. KLA FT 750 also includes a powerful set of software tools that can be used to analyze the wafer sample data collected. These software tools support the automatic and manual viewing of test data, statistical analysis, dipole analysis, defect classifying, and fault detection. Through the analysis of the collected data, engineers can make informed decisions when addressing potential design issues and improving the overall quality of the IC's. FT-750 is also designed for a wide range of roughness measurements which allows it to measure the exact surface shape of wafer ICs. This asset is well-suited for measuring the root-fields of bump structures and dead-layer thickness. In addition, this model is equipped with a dimensional measurement capability which includes optical, electrical, and atomic force microscopy-based approaches which uses off-axis imaging and voltage contrast methodology to reliably measure the thickness and morphology of the IC. In summary, TENCOR FT-750 is a comprehensive wafer testing and metrology equipment designed for the detection and analysis of defects and other characteristics in integrated circuits. This system features an automated high-precision microscope, a high-speed serial data acquisition unit, a SMARTSort technology and powerful software tools. This machine is well-suited for measuring the exact surface shape of wafers as well as their root-fields and dead-layer thickness.
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