Used KLA / TENCOR FT-750 #293652818 for sale

KLA / TENCOR / PROMETRIX FT-750 is a wafer testing and metrology equipment designed to provide accurate, reliable and repeatable measurements of 300mm and larger semiconductor wafers and die in a production environment. This system provides comprehensive testing capabilities including automated defect inspection, automatic particle analysis, optical and electrical measurements, overlay, defect discrimination, and failure analysis. KLA FT-750 is a high-precision, automated unit that utilizes a computer-controlled multisensor interferometer, a charge-coupled device camera, a high-speed linked robotic subsystem, and a sophisticated user interface. The interferometer delivered by TENCOR FT 750 is a high-accuracy imaging machine that includes an optoelectronic tool, an interferometer, a mechanical stage and a manipulator that enable the imaging of semiconductor structures from different angles. This asset incorporates a state of the art Fourier transform interferometer designed to accurately measure and image a variety of degrees of topography and optical contrast variations on a wide range of applications including photolithography, overetch, front-end-of-line (FEOL), and back-end-of-line (BEOL). The CCD camera provides the stability and accuracy required for high-resolution images over a wide range of applications. The metal-sealed robotic subsystem facilitates fast, accurate wafer loading and unloading between the interferometer and the user's workbench, and the highly intuitive user interface enables automated measurement sequences using pre-defined features and test process recipes. KLA FT 750 model also includes full statistical analysis capabilities that enable measurement of changes in feature profiles as a result of development and production processes. These features along with accurate defect imaging capabilities enable reliable defect classification and characterization. This equipment also includes a comprehensive suite of system management tools, including metrology process monitoring, automated operator prompt capabilities, performance and measurement sequence optimization, and error reporting. This versatile and comprehensive unit allows the user to gain access to the data they need while eliminating manual steps and reducing cycle times. Overall, FT-750 is an advanced wafer testing and metrology machine that delivers enhanced automation, improved accuracy and reliability, and greater throughput. The tool offers a comprehensive range of capabilities, allowing the user to monitor and collet data in a production environment, while also providing comprehensive statistical analysis capabilities. The asset's user interface allows for automated measurement sequences and streamlined defect classification and characterization, making it an ideal solution for semiconductor applications.