Used KLA / TENCOR FT-750 #9173658 for sale

ID: 9173658
Vintage: 1995
Thin film measurement system 1995 vintage.
KLA / TENCOR FT-750 is a next generation wafer testing and metrology equipment. It is designed to meet ever-increasing throughput and accuracy requirements in semiconductor device manufacturing. It is equipped with advanced optics, motion control, data collection, and analysis capabilities, all of which are monitored and controlled by an advanced system architecture. The unit utilizes a powerful imaging engine to generate sub-micron images with exceptional clarity and resolution. The imaging engine consists of a high resolution digital CCD camera, AutofocusTM lens, and an enhanced LED light source for illumination. The improved imaging machine achieves imaging capability up to 16x the resolution of previous models. KLA FT-750 boasts an innovative optical metrology tool to accurately measure a vast array of critical device characteristics. The integrated metrology asset utilizes both bright field and dark field imaging systems, combined with three-dimensional point scanning, to measure features as small as 0.2 micron across the wafer. The imaging and metrology capabilities of TENCOR FT 750 are complemented by a robust motion control model. This equipment consists of three actuated stages for additional precision in wafer positioning. Furthermore, a sophisticated vision-based alignment system is employed to ensure accurate registration of images to measurements. The internal data collection and analysis capabilities of FT 750 unit use sophisticated algorithms to characterize defect locations, sizes, and shape. These algorithms are combined with powerful database tools and automated defect classification to efficiently analyze and report test results. The machine is designed for integration with other semiconductor test and metrology equipment, allowing for efficient data transfer and reporting. TENCOR FT-750 is also able to utilize off-the-shelf software tools to aid in the reporting of test results and other analysis tasks. Overall FT-750 is an advanced wafer testing and metrology tool packed with innovative capabilities. Its powerful imaging, metrology, motion control, and data collection/analysis features provide highly accurate and reliable wafer characterization. The asset is highly capable of delivering features that meet the demanding requirements of next-generation semiconductor wafer fabrication.
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