Used KLA / TENCOR FT-750 #9377280 for sale

KLA / TENCOR FT-750 Wafer Testing and Metrology Equipment is a comprehensive set of integrated hardware and software for inspecting and measuring advanced wafer fabrication processes. It combines advanced metrology and defect inspection technologies into a single system for highly accurate, high throughput wafer testing and metrology. KLA FT-750 provides automated inspection of the entire wafer surface and in-line metrology through vision-based inspection technologies and automated non-destructive wafer testing. With its high-speed scan capability and multiple tools in a single unit, TENCOR FT 750 is able to inspect and characterize wafers for defects quickly and accurately. The machine also includes KLA Advanced Inspection Technologies (AIT) that provide for platform-independent defect inspection with standard operating software (SOS) on each tool and defect diagnosis with TENCOR Defect Diagnostics Tool (DDS). The platform-independent AIT technology helps to bridge the gap between features that are visible in the SEM image and relevant defect trends. KLA FT 750 is composed of three components: the wafer testing station, the wafer metrology station and the scanner. The wafer testing station is equipped with a powerful camera asset that provides rapid inspection and metrology of the wafer. The scanner is a high speed, multi-axis machine which is responsible for scanning the wafer and then transferring the image to the wafer metrology station. The wafer metrology station is the primary workhorse of the model and combines wafer inspection and metrology technologies into a single platform. It is equipped with two wafer inspection tasks - an optical inspection station and a scanning electron microscope (SEM) - and four automated metrology tasks. The automated metrology tasks include resistivity measurements, overlay measurement and AFM imaging and depth profiling. FT 750 Wafer Testing and Metrology Equipment offers an efficient system for wafer testing and metrology. Its integrated hardware and software enable fast and accurate inspections and measurements of wafers for maximum yield and process control. With its AIT technology, as well as its high-speed scan capability and multiple tools, FT-750 is an ideal choice for wafer inspection and metrology.