Used KLA / TENCOR FX 100 #9240150 for sale
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ID: 9240150
Vintage: 2005
Thickness measurement system
Module: EFEM
Missing PC
2005 vintage.
KLA / TENCOR FX 100 is a top-of-the line metrology and wafer testing equipment designed to provide precise measurements of semiconductor materials. This system offers advanced technologies to provide the most accurate results for wafer testing and metrology. KLA FX 100 has a high-resolution imaging sensor unit to accurately measure the characteristics of semiconductor wafers. This machine can measure material features down to sub-micron sizes. Additionally, the tool is equipped with a high-resolution imaging asset so that it can produce an accurate three-dimensional view of the wafer. This allows the user to accurately measureCritical Dimension (CD). The model also utilizes a high-speed, multi-axis stage to accurately image the complete wafer test area. For non-contact metrology, the equipment is also equipped with a robust non-contact metrology module, which can measure surface topography and defect features of the wafer. The non-contact metrology module is capable of identifying a wide range of defect types, including pits, dislocations, step cuts, and cavities. The system also comes with a highly advanced wafer verification unit to ensure accuracy and reliability of wafer test results. The wafer verification machine is capable of performing a comprehensive suite of electrical and mechanical tests on wafers. These tests include semiconductor device characterization, electrical parameters testing, and various integrity tests. The tool has the capability to verify the integrity of wafers even before testing. TENCOR FX 100 also has an automatic wafer handling asset to provide speed and accuracy for wafer testing. This model is capable of loading and unloading wafers quickly and reliably. Furthermore, the equipment has an automated recipe system that can store up to 50 recipes, allowing operators to explore different combinations of test parameters. For added user convenience, FX 100 unit also has a Windows-based graphical user interface (GUI). This allows users to quickly access and control the various test operations of the machine through the use of an intuitive interface. The GUI also provides automated data analysis tools, so that results from tests can be quickly and accurately evaluated. KLA / TENCOR FX 100 is an industry-leading wafer testing and metrology tool that offers innovative technologies and advanced features to ensure the most precise and accurate results. Its high-resolution imaging asset, non-contact metrology module, wafer verification, automatic wafer handling, and automated recipe model make it a reliable and robust equipment for wafer testing and metrology.
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