Used KLA / TENCOR FX 100 #9246541 for sale
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KLA / TENCOR FX 100 is a state of the art wafer testing and metrology equipment designed to improve yield and reduce scrap rates for semiconductor manufacturing. It utilizes a combination of optical interferometers, scanning electron microscopes, and automated defect inspection systems to detect and measure different types of defects on a variety of semiconductor wafer types. Included in KLA FX 100 system configuration are two scan heads: a large-field interferometer and a high-density optical microscope. These scan heads are paired with a selection of optical interferometers, a digital imaging unit, and a long-working-distance microscope. The machine's design combines precision metrology with the ability to measure angles, distances, and azimuths with dependable repeatability. It is capable of capturing data from the entire field of view, with low measurement error and high accuracy over a wide variety of wafer types. For defect location and measurement, TENCOR FX 100 tool employs advanced optical and electron microscopes, as well as automated inspection systems. These sensors can detect and measure various types of defects, like particles, voids, dislocations, surface non-uniformities, and structurally damaged areas. FX 100 also features automated gauging, statistical analysis, wafer mapping, yield analysis, and defect tracking tools. To ensure quality control in semiconductor manufacturing, KLA / TENCOR FX 100 can precisely measure all types of semiconductor wafers, using a variety of overlay and alignment techniques. To reduce the number of automated and manual tests, KLA FX 100 asset houses an integrated metrology console. This console includes an automated metrology interface for efficient defect location and measurement. The model also includes a high-throughput robotic wafer handler, which is designed for fast wafer handling and fast stress-testing. TENCOR FX 100 is an integrated equipment of testing and metrology designed to help maximize yield and increase production efficiency in semiconductor fabrication. The system's advanced, high-precision optical and electron microscopes, combined with automated inspection systems, are capable of identifying and measuring a variety of defects, while the integrated metrology console and automated wafer handler reduce testing time and costs. To ensure quality control in semiconductor manufacturing, FX 100 wafer testing and metrology unit is a powerful, reliable solution.
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