Used KLA / TENCOR FX 200 #293628442 for sale

KLA / TENCOR FX 200 is a wafer testing and metrology equipment designed for use in semiconductor fabrication and inspection. KLA FX 200 is built on a patent-pending optical imaging system that uses lasers, microscopes and advanced optics to create a focused imaging unit capable of metrology tasks down to the nanometer-scale. The machine has four channels for high resolution imaging, measurement and positioning of test structures on substrates, and supports a variety of measurement techniques for advanced characterizations such as overlay, height, planarity and shape testing. TENCOR FX200 tool is able to measure features on chips down to 20nm in size while maintaining high accuracy, resolution, and throughput. It integrates several high-resolution imaging techniques such as photomicroscopy, interferometry, topography and scatterometry to analyze the wafers and substrate materials. This combination of optical imaging, laser-based metrology, and precision lithography-capable positioning enables the asset to accurately measure features as small as 10nm in various patterns, shapes, orientations and sizes. FX 200 also includes an automated calibration model that can accurately measure and adjust parameters used for dimensional metrology, such as focus, magnification, tool resolution and detection range. This calibration equipment is optimized to perform high accuracy measurements with fast throughput. In addition, an automated substrate-handling system allows the user to quickly and easily transfer the wafer substrates. KLA / TENCOR FX200 also offers a selection of specialized software applications that are designed to help with chip inspections, measurements and reporting. These applications provide predicted results with high accuracy and traceability. This is possible thanks to several features, such as a customizable user interface, which allows users to adjust the instrument configuration for their unique applications. The unit also includes a data entry and management tool located on the instrument's user interface that simplifies the collection and retrieval of metrology data. Overall, KLA FX200 wafer testing and metrology machine is a reliable and accurate metrology tool that is capable of measuring to nanometer scales. The automated calibration and substrate-handling systems, as well as its specialized software applications, make TENCOR FX 200 a powerful and versatile tool for the semiconductor fabrication and inspection industry.