Used KLA / TENCOR HRP 340 #293601223 for sale

ID: 293601223
Profiler.
KLA / TENCOR HRP 340 is a wafer testing and metrology equipment that is designed for high throughput, high accuracy, and high resolution measurements. It has been optimized to provide fast and reliable measurement results for die-level, wafer-level, and sub-die-level measurements. The system features an enhanced optical unit, high-resolution image sensors, and an integrated software package that enables measurement of both electrical and optical parameters. The machine is capable of handling 8-inch to 300-millimeter substrates, and provides quick calibration and excellent metrology repeatability. KLA HRP 340 incorporates a number of optical, electrical, and digital components to ensure accurate and reproducible measurements. The optical tool includes an advanced high-resolution camera, a highly sensitive CCD camera, and a digital microscope to obtain high-resolution images. The asset is further equipped with a fully automated charger-discharger, which eliminates the need for frequent calibration. The model also has an integrated stage for automatic alignment and positioning of the wafers for testing. The equipment allows for both manual and automatic testing and features a comprehensive suite of software, including wafer-level testing tools, chip-level and module-level testing tools, and a data-driven analysis software. The software allows for testing of electrical parameters such as dopant profiling and impurity analysis, as well as optical parameters such as surface roughness and refractive index. The data-driven software can also provide wafer-level macro and micro defect inspection. TENCOR HRP 340 also features a dual-side metrology system to provide high-accuracy metrology results. The unit includes a uni-pixel optical sensor, a dual-channel CCD sensor, and a laser position sensor. The optical sensor provides accurate measurement of surface roughness, grain size, surface texture, and line width. The dual-channel CCD sensor provides precise measurement of line width, linewidth variance, edge placement error, and overlay accuracy. The laser position sensor provides accurate resolution of sub-micrometer measurement. Overall, HRP 340 is an advanced wafer testing and metrology machine that is designed to provide reliable and accurate wafer-level measurements. The tool features a combination of optical, electrical, and digital components that enable precise die and sub-die level measurements. The asset also features powerful software for die-level, wafer-level, and sub-die-level testing, as well as a dual-side metrology model for high-accuracy metrology measurements. With these features, KLA / TENCOR HRP 340 is an excellent equipment for wafer testing and metrology.
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