Used KLA / TENCOR HRP 340 #293656412 for sale

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ID: 293656412
Vintage: 2002
Profiler Dual FUOP type 2002 vintage.
KLA / TENCOR HRP 340 is a wafer testing and metrology equipment designed to provide comprehensive quality control for semiconductor device fabrication. It is a scanning electron microscope (SEM) that enables precision defect inspection and metrology measurement of micro-sized structures. This system is optimized for automated, high-speed wafer testing on 300 millimeter (mm) wafers and includes a variety of features to speed throughput and provide the highest accuracy. KLA HRP 340 is built on a modular architecture that allows for up to three simultaneous measurement and inspection tasks. It is a 300 mm unit with a single-side-access configuration which is optimized for high-speed wafer scanning. The machine also includes a 6 inch drift improved performance (DIP) table and a plasma-free sample transfer tool. TENCOR HRP 340 has a highly advanced imaging asset that enables high-sensitivity imaging as well as precise metrology measurements with sub-nanometer resolution. The model includes an extra bright semi-metal X-ray source and a high power ultraviolet laser which allow for detailed imaging and long depth of focus. The high-sensitivity electron imaging equipment is designed to enable precise detection of micro defects while also providing 3D measurement capabilities for device characterization. HRP 340 also includes an advanced system control and data acquisition software package (K-STAR). K-STAR includes automated unit control capability, automated processing of measurement and imaging data, and automated defect classification. It also provides support for numerous industry-standard protocols (e.g., IEEE, EDA, SIPI, ATE, etc.) making it easy to integrate KLA / TENCOR HRP 340 into existing production processes. KLA HRP 340 is a state-of-the-art wafer testing and metrology machine designed to provide precise measurement and imaging capabilities for high-sensitivity defect detection and density measurements. It is a powerful tool for controlling process and quality for semiconductor device fabrication, as it offers an advanced imaging tool, asset control software, and automated defect classification - all designed to provide the highest accuracy for quality assurance.
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