Used KLA / TENCOR HRP 340 #293662987 for sale

KLA / TENCOR HRP 340 Wafer Testing and Metrology Equipment is a high performance solution for automated wafer defect analysis and optical equipment metrology applications. Designed to meet the demanding needs of today's semiconductor industry, KLA HRP 340 is capable of providing nanometer resolution and a high analyzing speed - up to 40 wafers/hour. The system is composed of three subsystems to facilitate the entire wafer testing and metrology workflow. The first subsystem is the HPR 145 Metrology Unit, a fully integrated machine combining four wavelength geometric optics metrology machines (GOMM) and a laser profilometer. The second subsystem is the Patterned Wafer Inspection (PWI) tool, which includes a high resolution automated optical inspection device and associated software for inspecting narrow features and fine line patterns. Lastly, TENCOR HRP 340 includes a Defect Review & Analysis Asset for selecting wafers for in-depth inspection and to utilize the three subsystems for wafer testing and metrology applications. Using the HPR140 metrology model, a unique combination of four GOMM and a laser profilometer, manufacturers can capture high resolution images and analyze the geometries of wafers with speed and precision. With different wavelength technology and automation, accuracy and throughput are improved with nanoscale accuracy. The Patterned Wafer Inspection equipment, equipped with high resolution automated optical inspection device and related software, allows earlier detection and classification of defects. Wafer characteristics such as line width, line space, and edge placement can be accurately measured and inspected to ensure defect-free fabrication. Lastly, the Defect Review & Analysis System provides wafer-by-wafer review and analysis to ensure wafer fabrication and repair are being carried out effectively. Wafer defect characterization images and analysis results are collected and can be presented to the user in a customizable defect review report. HRP 340 Wafer Testing and Metrology Unit provides the semiconductor industry with a powerful and comprehensive solution for defect analysis and optical equipment metrology applications. With its high integrating speed, nanometre resolution, and comprehensive defect review and analysis subsystems, KLA / TENCOR HRP 340 is the perfect choice for ensuring quality and precision in advanced semiconductor manufacturing.