Used KLA / TENCOR HRP 340 #293777442 for sale

KLA / TENCOR HRP 340 Wafer Testing and Metrology Equipment is designed to provide automated, precise, and reliable results for wafer test and measurement. The system offers a wide range of features including full-field imaging, photomask defect metrology, critical dimension (CD) and etch depth measurement, over-etch CD analysis, and ultra-high-precision telecentric observation. KLA HRP 340 is equipped with a 25X telecentric stereo microscope, 6-inch laser interferometer, and a motorized x, y, z stage that can support up to four wafers simultaneously in an enclosed inspection environment. It offers the highest dynamic range of any wafer-testing unit available, and its variable magnification allows for accurate measurements in the nanometer range. At the heart of TENCOR HRP 340 is its powerful imaging and metrology engine. It utilizes an 8-way image processing pipeline to provide rapid analysis of complex defects, with near-infrared (NIR) imaging and measurement capabilities for enhanced depth of field. This allows HRP 340 to quickly analyze photomask anomalies, such as pinholes and foreign particles, and identify and accurately measure the dimensions of multiple defect structures, including contact holes, trenches, and line edge roughness (LER). The machine's advanced software includes CD/critical dimension metrology tools such as contour, line profiles, isolines, and planarity, ensuring precise measurements. It also offers high-resolution automated pattern-matching and anomaly-finding features that make it ideal for particle detection and high-throughput measurements. In addition to these features, KLA / TENCOR HRP 340 boasts one-click wafer alignment and rotational compensation capabilities, allowing operators to quickly and accurately reposition and measure wafers without wasting valuable time or resources. It is also equipped with an auto-focus module that ensures optimal image quality while reducing the risk of misalignment. KLA HRP 340 is compliant with SEMI and SEMI Standards and has been successfully used for 3D surface profiling and line-width measurement in the semiconductor industry. Overall, TENCOR HRP 340 Wafer Testing and Metrology Tool is an ideal solution for automatic wafer inspection, providing a comprehensive and powerful solution for accurate and reliable wafer test and measure.