Used KLA / TENCOR HRP & P Series #293597081 for sale

KLA / TENCOR HRP & P Series is a wafer testing and metrology system that provides unparalleled throughput and reliability. KLA HRP & P Series are designed to measure and correct process effects on critical layers like contact, gate and metal at the wafer level. The Non-Volatile Memory (NVM) layer is especially critical as it defines the ultimate in wafer fabrication performance. TENCOR HRP & P Series uses cutting-edge AutoSTAR™ optical and electron beam metrology for extremely precise NVM layer measurements and assessments. The SmartVue™ image defect detection tools enable reliable defect identification and location. HRP & P Series is configured with a maximum wafer size of 300mm as well as multiple measurement sensors, each of which have distinct application specific movements and device ranges. The optical metrology utilizes high-density scanning and multi-level zooming to ensure detailed defects inspection, characterization and classification. KLA / TENCOR HRP & P Series' electron beam metrology provides high resolution, repeatable and adjustable automated scanning for detailed analysis of stacking and layer thickness integrity. In addition, the patented High-Accuracy Die-to-Die™ feature of KLA HRP & P Series provides fast and accurate wafer-level thin-film thickness measurement with sub-nanometer accuracy. This ensures that critical thin-film layers meet the process specifications. TENCOR HRP & P Series systems offer a high mask throughput with a maximum of 800nm per second for die-to-die measurement, reducing the overall measurement cycle time dramatically. HRP & P Series systems are used in advanced metrology applications such as circuit design, advanced semiconductor process characterization and development, 3D integration, NTI/NTIP mapping and others. KLA / TENCOR HRP & P Series offer superior stability, performance, reliability and accuracy to meet the most stringent metrology requirements and process critical layers. It provides the highest sample throughput and cost-efficient operation to industry-leading manufacturers, making it an ideal platform for production control and monitoring of semiconductor wafer fabrication processes.