Used KLA / TENCOR / ICOS T830 #9218718 for sale

KLA / TENCOR / ICOS T830 Wafer Testing and Metrology Equipment is a high precision, advanced automation solution designed for semiconductor yield management and characterizing process development. The system is equipped with a high-resolution camera, a motorized sample stage, and a fully-automated substrate handling unit. The machine is capable of providing simultaneous metrology with rapid throughput, high-accuracy measurements, and repeatability and reproducibility of results. It offers the ability to measure wafer features rapidly and precisely by acquiring different kinds of physical properties. The tool is equipped with high-resolution digital imaging and enhanced logic and control systems for video rate imaging of complex engineering structures with great accuracy. It has an integrated pattern recognition (PR) ability that assists operators with reliable analysis of complex substrates such as SOI (silicon-on-insulator) and BCB (bisbenzocyclobutene). The asset utilizes a variety of metrology methods, such as spectroscopic imaging, 2D and 3D optical imaging, scatterometry, and dynamic ellipsometry to measure different properties. It is utilized for patterning characterization, across-wafer-die-characterization, defect site and isolation analysis, wafer-grid-parity measurements, and device-orientation assessment. With the integration of analysis and metrology capabilities, the model is capable of powerful equipment-level yield assurance. The system is equipped with PCB (printed circuit board) inspection and optical inspection and metrology that offers high-fidelity imaging. It is designed with modularity and scalability with improved flexibility, accuracy, and throughput. Its environmental protection components further enhance performance and stability of the unit, and provides cost-effectiveness. The machine is integrated with intuitive, interactive software platform that enables uniform, accuratemetrology with automated reporting and analysis. Its task-oriented programming allows fast setup of processes and analysis for feature recognition. This tool is also delivered with a variety of engineering and services support applications that make the implementation of asset easier. In conclusion, KLA T830 Wafer Testing and Metrology Model is an advanced automation solution specially designed for semiconductor yield management and process development. It is equipped with a high-resolution camera, a motorized sample stage, and a fully-automated substrate handling equipment, which makes it capable of providing simultaneous metrology with rapid throughput, high-accuracy measurements, and repeatability and reproducibility of results. Additionally, it is integrated with intuitive, interactive software platform and delivered with a variety of engineering and services support applications.