Used KLA / TENCOR / ICOS T830 #9223924 for sale

KLA / TENCOR / ICOS T830 Wafer Testing and Metrology Equipment is a versatile, fully automated metrology platform designed for the characterization of single wafer and reticle scale devices. The system enables fast, accurate, and precise data collection at each stage of wafer metrology, enabling better device characterization and yield optimization. KLA T830 uses multiple non-destructive optical metrology techniques to measure both device wafer size and features within a single device. The unit enables near real-time parallelism to determine device sizes in areas up to 500 mm in diameter, permitting extremely wide area coverage even in device structures that may exhibit variable photolithography processing and other effects. Measurement options such as focus and exposure, surface topography, and defect detection provide further characterization parameters. The machine incorporates advanced image processing algorithms for maximum accuracy, and also enables high throughput run rates. Automation capabilities integrate measurement data and process control data from multiple sources at the same time, initiating new test paths and generating alerts for quality control purposes in real-time. The design incorporates advanced platform control functionality, including memory and hardware validation testing. ICOS T830 Wafer Testing and Metrology Tool allows for simultaneous measurement of device parameters such as critical dimensions, resistivity, planarity and defect detection. The asset obtains measurements from multiple metrology tools that can range from critical dimension scanning electron microscopes to optical profilometers, allowing for the production of high resolution 3-D maps of device features. In combination with additional modules such as KLA TSSI (Test Structured Support Interface), the model provides comprehensive visual design analysis support by producing statistics on test structures such as surface topography, metrology data analysis techniques, and in-depth reliability analysis. Integrated data storage and analysis allows root cause analysis to be performed in cases where a defect occurs in a device structure. The modular design of TENCOR T830 Wafer Testing and Metrology Equipment facilitates device compatibility by allowing compatibility testing against multiple devices in a single architecture. With highly optimized software platforms, the system delivers high performance imaging, data retrieval, and analysis. With multiple processes running concurrently, the unit is capable of generating actionable results in a matter of minutes. T830 Wafer Testing and Metrology Machine is an advanced wafer testing and metrology technology designed to quickly and accurately provide valuable insights about device parameters. The tool provides the flexibility, accuracy, and speed needed for modern device testing, and its advanced features enable comprehensive device characterization.