Used KLA / TENCOR LMS IPRO5 #9163708 for sale
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ID: 9163708
Vintage: 2012
CD Metrology system
Photomask registration
0.25 inch photomask and EUV masks
Static positional repeatability: 3s (Short therm: 0.5 nm)
Dynamic positional repeatability: 99.7% limit (Long term: 0.8 nm)
Positional accuracy: 99/7% limit (Long term): 1.0 nm
Light mod: Reflective and transmitted
Measurement principle:
Edge detection of parallel edges
Center of Gravity algorithm
Pattern centrality measurement capability
Illumination source wavelength: 266 nm
Objective lens: 80x, NA 0.80
Working distance: 6.9 mm
Stage laser positioning system: 0.15 nm (LAMDA / 4096)
Wavelength compensation: ETALON
Field of view: 22.5 microns by 22.5 microns
Handing: RSB 200 SMIF input / output
Mask stocker capacity: 2 x 4 6025 reticles
Software:
MS Windows 7
KLA Job processor
KLA LMSCOrr
KLA Deva
KLA CD Calib
KLA System monitor
KLA LMSASCII
KLA GEM Module
2012 vintage.
KLA / TENCOR LMS IPRO5 is a high-performance wafer testing and metrology equipment that helps improve manufacturing productivity and process uniformity. It features high-accuracy measurements and reliable operation, making it ideal for companies in the semiconductor industry. The system has a powerful software platform that enables automatic test-data analysis and advanced process control. The unit is composed of several components that work together to accurately measure the properties of specific wafers. Its optical module provides automatic measurement of each wafer's critical dimensions. Its Carriage modules are responsible for delivering the proper tooling to the wafer undertest. The machine's chipset consists of several sophisticated chips, which provide the logic, motor control and digital signals needed to control the tools. The tool's integrated metrology capability collects and analyzes a variety of test data such as IQ, OQ, and PQ metrics without requiring manual programming. It also features specular surface reflectance, which helps improve the accuracy and sensitivity of the measurements. Furthermore, its Auto-Focus capability helps reduce the need for manual intervention, thereby improving process reliability. The asset also has an easy-to-use, intuitive software user interface. It allows operators to easily set up their test parameters, calibrate the measurement model, and analyze data. This intuitive user experience enables even the most inexperienced operators to quickly get up to speed with the equipment. KLA LMS IPRO5 is designed to be flexible and scalable to meet the demands of the modern semiconductor industry. It offers a wide range of process capabilities and advanced metrology solutions. The system is also highly reliable and easy to maintain. Furthermore, its modular design permits upgrades. All of these features make it the perfect wafer testing and metrology unit for improving manufacturing productivity and process uniformity.
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