Used KLA / TENCOR M-GAGE 200/300 #293652075 for sale

KLA M-GAGE 200/300 is a wafer testing and metrology equipment designed for sub-50nm processes. It features a leading edge, optical inspection platform and an innovative, silicon-proven, vertical scanning technology. This system is equipped with a 200 or 300 mm auto-load station along with an advanced auto-alignment feature that allows for fast, efficient results. The proprietary sensors used in the unit provide users with high-resolution data capture capability. The advanced optics and high-sensitivity sensor insure minimal defect detection without any false-positive results. Additionally, the multi-correlator technology provides an unparalleled view and quantifiable assessment of a wafer's surface. The M-GAGE can identify state-of-the-art defects such as random, line edge-roughness and widely dispersed particles. The machine has a high throughput that can accommodate up to 200 wafers per hour and includes the popular Align-Check technology to quickly align the test alignment. This tool is designed to be modular and provides customizable configurations according to the customer's needs. A broad range of testing and metrology tasks can be performed on wafers including process optimization, focal plane detection, fault analysis and edge response analysis. The integrated QualWafer software manages all device and asset parameters, creating a simple user interface that can quickly execute tests. Further, the software keeps a strict audit trail to allow traceability and batch control. The powerful TENCOR M-GAGE 200/300 model is ideal for semiconductor manufacturers looking for reliable, precise, and efficient wafer testing and metrology results. With its user-friendly design, high-performance optics, and advanced multi-correlator technology, the M-GAGE equipment offers superior data integrity and productivity.