Used KLA / TENCOR M-GAGE 200/300 #293766227 for sale
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KLA M-GAGE 200/300 is an advanced metrology and wafer testing equipment designed for semiconductor research and production applications. This system offers complete metrology and wafer testing capabilities in a single, integrated platform. It combines advanced optical metrology and advanced mechanical testing capabilities to provide the highest precision and accuracy in determining device properties. The unit provides complete characterization of the wafer thickness, flatness and profile data, as well as step height measurement, layers and material identification and various electrical parameters. The machine utilizes advanced optical metrology combined with mechanical testing capabilities, allowing for exact measurement and accurate reporting of process related and device data. Featuring a unique, two-stage electro-mechanical calibration process, this tool ensures accurate reproducible measurements and highly accurate results. The two-stage calibration results in both high speed and high accuracy in all measurements, minimizing product variability and ensuring consistent performance across production runs. The asset also features a robust data handling model, providing an entire suite of wafer processing and metrology capabilities. This equipment can integrate data sources such as Auto Fab, auto-inspection and SEM images, allowing for comprehensive analysis of the entire wafer. The data is analyzed and stored for production or engineering purposes and can be used to analyze each feature of the wafer and develop corrective, preventive or product enhancement strategies. The system is powered by a range of popular software platforms such as WinTec, Clear Edge and LightSphere. These programs provide comprehensive wafer and device data acquisition and processing features, allowing both researchers and production staff to quickly and accurately analyze and interpret wafer data. TENCOR M-GAGE 200/300 is an advanced metrology and wafer testing unit designed for usage in prestigious semiconductor research and production applications. With its advanced optical metrology capabilities, mechanical testing and robust data handling, this machine provides the highest precision, accuracy and consistency for processing and inspecting a range of metrology and device data. This tool is sure to be an important asset for any semiconductor or device research and production facilities.
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