Used KLA / TENCOR M-Gage 300 #293830692 for sale

KLA / TENCOR / PROMETRIX M-Gage 300 is an advanced wafer testing and metrology equipment that offers the benefits of its advanced technologies. This system combines the best of two imaging technologies with the advantage of high throughput metrology - a combination of optical and scattering-based scan techniques. The optical imaging technique allows high-resolution imaging of the wafer at a zoom level of up to 3000x. This unit also combines optical scatter techniques with high throughput metrology to provide a full wafer image which includes features that are too small to be detected by traditional optical inspection, enabling detailed analysis of the failure source and contributing to faster process recovery time. The scatter techniques utilized in KLA M-Gage 300 allow for a defect coverage rate of only 0.5 micron. This method of wafer testing and metrology also offers a high throughput of 10k wafers per hour, significantly reducing cycle times as compared to other systems. TENCOR M-Gage 300's array of technology also allows for multiple types of inspections and characterization. Through its combination of high-resolution imaging and scatter techniques, the machine can be utilized to detect defects from the epi- layers, measure film thickness and perform electrical testing and characterization. Other applications include: defect and leakage location, gate oxide evaluation, gate presence and electrical contact evaluation, as well as local and global wafer surface analysis. The advanced technology of M-Gage 300 is further evidenced by its optics, which combines a series of aspheric and telecentric lenses and a 20X macro focus lens, providing superior image capturing capabilities. The illumination tool features a Gen6 Canon light source with a scanning galvanometric mirror providing uniform illumination and low heating. The asset also features an AccuScale, which offers repeatability of 0.2 micron at a zoom magnification of 3000X, and data with sub-pixel accuracy. The capabilities of PROMETRIX M-Gage 300 offer the high-resolution imaging, high throughput metrology and wide range of testing options that make it a powerful tool for efficient wafer testing and metrology.