Used KLA / TENCOR M-Gage 300 #9158625 for sale

KLA / TENCOR / PROMETRIX M-Gage 300 is an integrated wafer testing and metrology system designed to yield highly accurate measurement results for ultra-small geometries up to the 3X nanometer node and beyond. KLA M-Gage 300 combines advanced process-ready metrology tools, such as an APS (Auto Patterning Structural) CD, OPC (Optical Proximity Correction) CD, and Defect Inspection (DFI) capabilities. It provides optical resolution down to 10 nm, mitigating the challenges of measurement over traditional metrology tools used for larger geometries. TENCOR M-Gage 300 is constructed with an advanced sample stage technology that enables absolute accuracy and repeatability for high throughput measurements. The sampling stage creates a seamless process window between metrology and wafer production, allowing maximum throughput while not sacrificing accuracy. The result is lower cycle times, higher yields, and improved yield. M-Gage 300 integrates process-ready metrology tools to track and measure multiple layers and critical on-wafer features, such as patterning, solder bumps, and pillars and studs. It also has full-layer defect inspection capabilities, offering a comprehensive review for each layer using a variety of inspection algorithms. With the OPC CD, PROMETRIX M-Gage 300 can capture and analyze additional occurrences of potential yield-reducing issues. Other features of KLA / TENCOR / PROMETRIX M-Gage 300 include advanced edge-ckt capabilities that measure very small features quickly and accurately. It also supports multiple measurement locations with uniformity capabilities and radial scanning for increased throughput and accuracy. The system supports mask-range measurements, and is accurate, repeatable, and repeatable on multiple silicon wafer sizes. The intuitive user interface enables ease of use, with straightforward tutorials, scripts, and reports. Complete traceability is enabled with log files and on-board tracking capabilities. Finally, KLA M-Gage 300 is designed to be modular and upgradeable, so that its capabilities can be upgraded and enhanced with future advancements throughout its multi-year life cycle.