Used KLA / TENCOR P22H #9214889 for sale
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ID: 9214889
Wafer Size: 8"
Automated surface profilometer, 8"
Open cassette
Handler with wafer pre-aligner
Computer
Operating system: Windows 3.11 / Windows NT.
KLA / TENCOR P22H system is a powerful tool used for wafer testing and metrology. It is a member of KLA family of automated wafer inspection equipment that is used in the semiconductor industry. KLA P22 H is capable of inspecting and measuring wafers with dimensions ranging from 8" up to 200mm in size. The unit is equipped with 6 processing stations that offer a combination of inspection and metrology capabilities that include optical, mechanical, and electrical. TENCOR P-22H's design is focused on offering high-throughput and precision measurements with advanced feature recognition and classification on a range of products. Its optics contain two large aperture full field-of-view (FFV) CCD cameras, along with a multiple LED light sources and specialized optics. P-22H provides imaging capability such as high resolution bright field (BF), dark field (DF), multi-zone bright field (MZBF), and line scan. This allow inspection of small high-aspect ratio features, which is a big benefit for many applications. Additionally, line scan mode enables non-destructive inspection of optically programmable phase-shifted gratings, low voltage materials, and emerging materials. The instrument is also outfitted the revolutionary Adaptive Scanning Architecture (ASA), a versatile pattern recognition system. This allows it to inspect wafer patterns accurately even when there are aspect ratio differences caused by process uniformity. KLA P-22H also provides an impressive 0.2nm resolution of measurement and a built-in focus algorithm that further helps ensure high accuracy of data. This helps customers confidently measure highly precise components without the need for manual adjustment. Enhanced throughput and repeatability performance are ensured by a large motors that move the wafers from station to station with speed and accuracy. Ultimately, P22 H is an expertly designed system for conducting wafer testing and metrology. With its advanced imaging and measurement capabilities, and Adaptive Scanning Architecture, KLA / TENCOR P22 H provides an impressive performance that meets the rigorous needs of the semiconductor industry.
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