Used KLA / TENCOR P1 #293643497 for sale

KLA / TENCOR P1
ID: 293643497
Profiler.
KLA / TENCOR P1 is a next-generation, automated wafer testing and metrology equipment. It combines engineering precision and measurement accuracy with intuitive graphical user interfaces and automated processes to meet the demands of today's high-volume production. KLA P-1 system is capable of full wafer processing up to 12 inches in size and supports both single-wafer and batch-mode operation. TENCOR P 1 unit uses a maximum of three sets of metrology head modules, each with their own integrated hardware components, to make up a single process cell. Each module contains advanced optics and precision motion control systems to ensure the highest levels of accuracy and repeatability. The machine is also equipped with laser-based autofocus, facilitating simple, precise setup and fast alignment of the measurement plane with the wafer plane. The wafer testing and metrology process starts by loading a wafer in a specific recipe. Parameters such as exposure levels, target focus, measurement plane and measurement points are selected by the operator. The optics measure and inspect the wafers for thickness, geometrical shape, defects, overlay, focus, and topography. The results of this process are relayed back to the user with an accuracy of less than a micron. To ensure precise measurements, KLA / TENCOR P 1 tool utilizes KLA proprietary True Angle technology. This technology reduces measurement errors and improves the consistency of results by ensuring that the measurement plane is always perpendicular to the wafer plane. The asset also has intuitive graphical user interface to guide the operator and to simplify routine functions. P 1 also offers an array of comprehensive control and data acquisition features. Its integrated machine intelligence (MI) platform monitors the wafer-testing operations with integrated monitor and control features. The MI platform also helps operators troubleshoot any issues at any stage of the process in real time. Overall, TENCOR P1 is a powerful, intuitive, and efficient wafer testing and metrology model. The equipment provides accurate and consistent measurements that are quickly transferred to the user. Its combination of systems, technologies, and features make it the ideal choice for both cost-sensitive and high-volume production facilities.
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