Used KLA / TENCOR P10 #293751600 for sale
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KLA / TENCOR P10 is a multifunctional wafer testing and metrology equipment designed to enhance quality, performance and reliability of semiconductor wafers in a cost-effective manner. The system offers a wide range of advanced tool characterization capabilities and is used to inspect and measure 300mm wafers. The unit offers a choice of four tool configurations and is equipped with advanced high-speed optical inspection algorithms, automated tunable wavelength spectroscopic ellipsometry, 2D and 3D defect imaging, intelligence pattern recognition and process control. The machine also provides automated and high-precision 3D surface measurement capabilities for precision surface characterization. KLA P-10 features a sealed wafer chamber for maximum temperature control and uniformity. The hydrogenated Class 00 and 100 laminar flow configurations ensure high-throughput wafer testing and metrology performance. A wide range of physical and chemical test capabilities are supported, including photoluminescence, secondary electron imaging, optical emission spectroscopy (OES), x-ray photoelectron spectroscopy (XPS) and scanning electron microscopy (SEM). The tool has an intelligent double-sided measurement capability, enabling simultaneous sample testing from both sides. It also supports automated sample preparation and handling, allowing for efficient and error-free sample conditioning. The asset has included library interfaces for automatic test program execution and results acquisition for further analysis. The model also provides a unique Alibi Mode that enables simultaneous metrology and testing without affecting equipment performance. The robust features and optional accessories for TENCOR P 10 make it suitable for a wide variety of automated test processes. It also integrates easily with other existing tools and production lines, allowing for a more efficient and integrated manufacturing process.
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