Used KLA / TENCOR P10 #293806945 for sale

KLA / TENCOR P10 is a wafer testing and metrology equipment designed for a variety of applications including process control, failure analysis, and integration of front-end processes. The system uses a proprietary optical technique, called Contouring Beam Delivery, to accurately and quickly image a wafer surface down to the nanometer level. It can detect particles, defects and line widths with precision. The unit's imaging technology begins with a 20x microscope objective lens, and uses a motorized stage to scan the wafer surface, while a gradient of laser beams move to match the contours of the sample. This ensures that what is observed is a close representation of the real surface, as opposed to typical optical systems which are limited to flat surfaces. The Contouring Beam Delivery also improves signal to noise ratios for better accuracy and improved throughput. However, the machine can collect more data than is necessary for process control, allowing for flexible evaluation capabilities and advanced failure analysis when so desired. KLA P-10 offers high resolution that surpasses most optical systems, boasting 0.1nm layer thickness imaging at 1x field depth and 0.02nm feature imaging at 1x field depth. It also features one of the best imaging speeds on the market, capable of scanning up to 800x400 mm of the synchronized field of view in less than 18 seconds. Beyond optics, TENCOR P 10 includes several sophisticated optical analysis, process control analysis, wafer level statistics and fault analysis modules, enabling tool users to evaluate wafers quickly and accurately. The asset's multi-beam technology offers fingertip access to each wafer's defects in both 2D and 3D representations, making it one of the most reliable and powerful systems on the market. A number of other technologies are also built into KLA P 10, including automated non-contact dimension measurement, automated topography measurement, and automated/analytical deep hole and fiducial detection. These features, combined with its exceptional imaging capabilities, makes TENCOR P-10 an ideal solution for a variety of wafer testing and metrology applications.