Used KLA / TENCOR P10 #9410939 for sale
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ID: 9410939
Wafer Size: 8"
Profilometer / Surface profiler, 8"
M2 XR Rolling stand
Vertical features ranging: 100 A to approximately 300µm
Vertical resolution: 0.5, 2, or 10A
Micro-roughness: 0.5Å (0.002 min.)
Semiconductor wafers
Thin-film heads
Precision-machined and polished surfaces
Ceramics for micro-electronics
Glass for flat panel displays
Optical surfaces.
KLA / TENCOR P10 is a wafer testing and metrology system designed specifically for manufacturers of large-scale integrated circuits (LSIC), optoelectronics, and MEMS. KLA P-10 is built using robust, industry-standard components and utilizes a multi-probe configuration to test each wafer at multiple points. It offers comprehensive metrology capabilities, combining imaging and electrical measurements. Furthermore, it offers a variety of measurement capabilities, such as mapping of transistor devices and other surface features, imaging at multiple magnifications, active optical scatterometry (AOS), flux measurements, and electrical I-V testing. TENCOR P 10's multi-probe configuration is often advantageous in testing products that have components located in different areas of the wafer. With probe points at each wafer side, as well as along the circumference, it allows for testing at multiple locations. TENCOR P-10 also provides users with a choice of probes depending on their specific application, with both inter-die and edge probing options. The two-position capability minimizes the effect of the edge of the probes on the measurements. KLA P 10's imaging capabilities include a variety of features, such as Gate Delay circuits, Contacts, Features, Isolation Width, Residual Blockages and Leaks, Delamination, Color Contrast, surface ruggedness, topography, and cross-section imaging. The Optical Wafer Inspect feature also provides users with accurate imaging of wafer shape, flatness, warpage and line width. Additionally, KLA / TENCOR P-10 is capable of active optical scatterometry (AOS), enabling users to quickly obtain accurate measurements without the need for manual defining of levels. KLA / TENCOR P 10 also offers a variety of electrical test capabilities, such as Transistor Characterization (I-V), Transistor Modeling, DC Impedance Tests, and Reliability Tests. This enables users to quickly analyze transistors and test their reliability and performance. Furthermore, KLA P10 is equipped with a low-noise amplifier/high-speed system for testing nano-scale devices. This ensures that pulses are accurately detected, resulting in more accurate measurements. In conclusion, P10 is a versatile wafer testing and metrology system that offers many features for large-scale integrated circuit (LSIC) manufacturers. It boasts customer-centric features such as multi-probe configuration, imaging and electrical measurements, flux measurements, and active optical scatterometry (AOS) that enable better quality control and real-time process feedback.
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