Used KLA / TENCOR P11 #293718563 for sale
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ID: 293718563
Film thickness measurement system
Scan length: 60 mm
Stage size: 170 mm
Stylus pressure: 0.5-50 mg
Scan speed: 1 µm/sec
X and Y Positioning speed: 25 mm/sec
Maximum travel distance: 205
Resolution: 0.5
Power supply: 100 VAC, Single phase, 50/60 Hz.
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