Used KLA / TENCOR P11 #9314006 for sale
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KLA / TENCOR P11 is a wafer testing and metrology equipment that provides fast and accurate wafer geometrical measurements for process control, research and development. The system enables automated die-sort capability and a wide range of wafer geometrical measurements including critical dimension (CD) measurements such as line width and line edge roughness, area measurements such as pattern flatness and scanning interferometry. It features an innovative, high-speed optical module, a unique lens design, as well as an advanced illumination unit, giving it the capability to make precision measurements of the most complex geometrical features. KLA P-11 machine is highly flexible and supports multiple applications. It is designed to be modular and upgradeable, enabling customers to add new capabilities without the need to contact the manufacturer. It is designed to maximize measurements per wafer, providing high throughput and cost-efficient solutions for both research and production environments. TENCOR P 11 can be configured to accommodate both flat panel displays and sample wafers up to 300 mm in diameter. The tool is also equipped with a highly sophisticated, dual-beam optical microscope asset that allows the collection of data such as height, area, line width and critical dimension measurements. P11 also offers a high-precision motorized height axis and a motorized inspection stage, allowing precise control over measurement location and repeatable results. Additionally, KLA P 11 incorporates an automated, auto-zero calibration model to ensure accurate and repeatable measurements. Furthermore, the equipment has an on-board library of diameter-specific recipes that can be used to quickly set up the wafer metrology system and take measurements without the need for manual calibration. Overall, TENCOR P-11 is an accurate and flexible wafer testing and metrology solution that is capable of precise measurements and cost-efficient operation for both research and production applications. Its sophisticated dual-beam optical microscope unit and automated calibration ensures precise measurements, while its on-board library and upgradeable capabilities give it the potential to remain cutting edge for extended periods of time.
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