Used KLA / TENCOR P12 #293589209 for sale

KLA / TENCOR P12
ID: 293589209
Disk profiler.
KLA / TENCOR P12 is a wafer testing and metrology equipment designed to inspect wafers with high precision and accuracy. To carry out this task, it supports various techniques such as optical microscopy, scanning acoustic microscopy (SAM), optical overlay measurements and line profile measurements. The system is composed of three subsystems namely, Optifab, Metrology and YieldStar processes. The Optifab process facilitates automated inspection of the surface topography of the wafer, roughness measurements, feature analysis and lithography analysis of defects, enabling the user to identify target defects and potential sources of defects. It utilizes a customized stage for motion accuracy and stability, optical diffuser for image analysis, and imaging sensors for high resolution topology measurements. The unit is accurate and sensitive to detect even the smallest of defected patterns on the wafer surfaces. The Metrology process is responsible for providing high resolution metrology services such as line profile measurements, lateral robustness measurements and contact hole imaging. It features a non-contact generation sensor, a high accuracy scanning stage and optics machine, to measure line width and line profile with high accuracy. The tool is also equipped to inspect waveforms, angles and the contact holes' size and symmetry, making it versatile and highly precise. The YieldStar process helps in further processing the captured data from the previous two processes. It collects data from the wafer for yield evaluation and uses a tomography style algorithm for pattern recognition. The user interface allows for customizable statistical analysis of the data inputs from the previous processes. KLA P 12 has been designed to meet the increasing demand of semiconductor manufacturers for efficient and precise testing of their wafers. Its comprehensive feature set make it suitable for both research and production environments, allowing users to make faster and more precise decisions regarding their wafer fabrication process. With its three integrated subsystems and fine-tuned accuracy, TENCOR P-12 is a must-have tool for any wafer testing and metrology task.
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