Used KLA / TENCOR P12 #9358965 for sale
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KLA / TENCOR P12 wafer testing and metrology equipment is an automated defect inspection system designed to ensure the quality of semiconductor wafers during the process of manufacturing. The unit uses a variety of detection and measurement techniques to identify any flaws in the wafer material. It is capable of detecting and measuring a variety of particle sizes, shapes, and different types of imperfections in the wafer, such as line-edge/space variability, voids, particles, scratches, and contamination. KLA P 12 is an advanced equipment that includes an inspection module equipped with a wafer handling and mapping machine, the inspection tool, and the imaging tool. The tool is capable of 20nm resolution, which is necessary for high-end process control and defect-free wafers. The tool utilizes a multi-mode wafer handling asset providing precise movement, accurate positioning and alignment of the wafers. The imaging model includes an array of actinic and brightfield illumination with a direct optical microscope. The equipment is capable of real-time high-resolution images of the wafers to detect and measure surface irregularities, defects, and particles. TENCOR P-12 is equipped with powerful defect analysis software which is capable of detecting and classifying particle and defect sizes and shapes. The system can also identify important features of the wafer such as device density, line width, and thickness variations. The software can compare the device statistics to expected values and will alert the operator if anything is out of specifications. The unit also includes key data storage and report generation features for detailed process report monitoring and archiving. Overall, KLA / TENCOR P-12 is a powerful wafer testing and metrology machine designed to maximize the yields of semiconductor production by detecting and measuring particles and defects on the wafers. Its 20nm resolution, potent defect analysis software, and data storage/report generation capabilities make it an invaluable asset for any semiconductor manufacturing business.
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