Used KLA / TENCOR P15 #293645079 for sale
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KLA / TENCOR P15 is a state-of-the-art wafer testing and metrology equipment designed to ensure the highest yield in the production of ultra-large-scale integrated (ULSI) systems. KLA P-15 offers high-performance, non-contact wafer inspection to quickly and accurately measure the geometrical and electrical parameters of semiconductor devices. TENCOR P 15 features a pneumatic scanner which moves the wafer contactless at extremely high speed, allowing a large area of the wafer surface to be measured at once. TENCOR P15 utilizes a high-resolution imaging system that captures images of the surface of the wafer. The unit then analyzes the images to measure the patterning accuracy, device size, and placement, as well as the general surface topography. It can also measure electrical characteristics such as the resistance, capacitance, and inductance of transistors. KLA has incorporated leading edge technologies into the machine to ensure the best possible yield. For example, KLA P15 features a high-resolution optical profilometer which is capable of measuring components as small as 0.02 microns. It also features a high-powered laser spot size reduction tool which allows for accurate probing of small-geometry features without damaging them. TENCOR P-15 also features automated wafer analysis which is capable of performing detailed visual and statistical defect analysis. It can detect subtle defects such as scratches and micro pits, at rate of up to 14,400 sites per second. Additionally, it can check for performance parameters such as process capability, solder bump height, and flatness. These features make KLA / TENCOR P 15 one of the most powerful and reliable systems available. It is designed to meet and exceed the demands of the most stringent production environments, while giving manufacturers the confidence that important test data is being gathered efficiently and accurately.
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