Used KLA / TENCOR P15 #293735654 for sale
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ID: 293735654
Wafer Size: 8"
Vintage: 2002
Surface profiler, 8"
Microhead II SR Stylus measurement head
Vacuum
Pentium III Microprocessor, 733MHz
RAM, 256MB
Motorized X-Y stage
LCD Color monitor, 19"
Voltage: 220V
Frequency: 50Hz
Current: 4A
Scan length: 205mm
Scan speed: ~ 25 mm/sec
Measurement range: 13um / 65um / 327um
Stylus force: 1 ~50mg
Stylus tip (Green): 2um radius
Operating system: Windows NT 4.0
2002 vintage.
KLA / TENCOR P15 is a wafer testing and metrology equipment developed by KLA Corporation. It is a versatile, fully automated system designed to accurately measure critical dimensions, overlay and uniformity of high-volume semiconductor devices. The unit is capable of measuring features in a wide range of sizes and with high accuracy, making it suitable for optical and electrical wafer testing and metrology applications. KLA P-15 machine employs a large-format stage, which can accommodate a variety of substrates up to 8" in size. This ensures accurate positioning and alignment of the wafer for testing and measurement. The tool is able to measure features on the wafer ranging from 0.2um to 25um in size. It is also capable of measuring a variety of layers, including gate, contact, and interconnect layers. TENCOR P 15 asset includes a variety of sophisticated software tools that enable operators to quickly measure and analyze components on the wafer. These tools include a high-resolution, fast-scanning imaging sensor and a pico-positioning stage. The imaging sensor is capable of capturing images of the wafer at high magnification, while the pico-positioning stage enables precise positioning and alignment of the wafer for accurate measurement. TENCOR P15 model also features an advanced laser scatterometer, which is able to measure overlay and uniformity of devices on the wafer. The laser scatterometer measures the relative overlays of devices to the substrate for improved process control. Additionally, by using this feature, the equipment can detect errors in layer and feature deposition on the wafer. In addition to the laser scatterometer, KLA P15 system includes a variety of other sensors, including vision sensors and capacitive sensors. These tools are used to measure a variety of parameters on the wafer, such as electrical uniformity and layer thickness. This information is then used to create comprehensive reports for analysis and review. Overall, P-15 unit is a highly-sophisticated, easy-to-use tool for quickly and accurately testing, measuring and monitoring semiconductor devices. It is equipped with a variety of software and hardware features that enable users to analyze their wafers with high accuracy and precision. KLA / TENCOR P-15 machine is highly recommended for all high-volume semiconductor device testing and measurement applications.
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