Used KLA / TENCOR P15 #9293535 for sale

KLA / TENCOR P15
ID: 9293535
Vintage: 2000
Inspection system 2000 vintage.
KLA / TENCOR P15 is a versatile, cost-effective wafer testing and metrology equipment designed to meet the needs of semiconductor processes. It offers a wide range of wafer characterization and measurement capabilities for up to 8″, 12″, and even larger wafers. This system utilizes an advanced laser, optics, and mechanical components to measure key wafer attributes, including surface roughness, critical dimension, profile, line edge roughness, and other critical characteristics. KLA P-15 is designed around a large stage and imaging optics that allow the user to accurately scan and capture the surface of the wafer. The optical components are optimally configured to maximize imaging performance, while the lasers are utilized to provide accurate measurement data. The unit features multiple sensor heads, each with a unique field-of-view, allowing it to measure features in all spatial directions. The two independent XY-stages provide variable-speed scanning, improved throughput, and more precise metrology data. The machine offers a variety of measurement modes, including low-kV, ultra-low kV, bright-field, and dark-field, allowing it to measure a wide variety of wafer attributes. Additionally, TENCOR P 15 offers automatic alignment and defect detection capabilities. This feature speeds up and simplifies the task of testing, compared to manual sampling. TENCOR P15 is designed for ease of use and data collection. The open architecture allows for easy integration with other systems and enables data collection from multiple sources. It is easily configurable for different wafer sizes and materials, and can be used for process failure analysis, monitoring, and development. Additionally, it is designed for easy calibration, maintenance, and repair, with a range of optional components that can be added to customize the tool. Overall, P 15 is a versatile, cost-effective asset that offers a range of measurement, testing, and metrology features. It offers a variety of features and functions that make it an ideal solution for process engineering, quality control, and trouble-shooting in semiconductor manufacturing.
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