Used KLA / TENCOR P15 #9313370 for sale

KLA / TENCOR P15 is a wafer testing and metrology equipment designed to provide accurate surface and electrical characterization data during device fabrication. The system supports various industry standard test protocols including Wafer Ordered Exam (WOE), Finite Element Analysis (FEA) and wafer stress testing. The unit is based on advanced 4-quadrant differential sensing technology and utilizes a dual-channel interferometric measurement head to obtain high accuracy surface and electrical data. The machine is capable of measuring both spot-resolved and area-measured electrical parameters, including threshold voltage, flatband voltage and mobility. Key capabilities of the tool include a superior measure accuracy, repeatability, robustness and high throughput. The asset is also able to perform real time wafer mapping to identify specific regions on the wafer with non-uniform surface or electrical characteristics. The model is built on a scalable open platform and is equipped with a range of specialized tools such as a wafer alignment equipment with 6-Axis motion control, an advanced optical microscope for sample alignment and inspection and a powerful computer for data analysis and software control. Additionally, it uses an innovative automated calibration methodology that eliminates manual processing steps, thus improving system uptime, performance and accuracy. The unit supports a wide range of test head configurations and a range of wafer sizes including 200mm, 300mm and 450mm wafers. It is designed to comply with applicable industry standards relating to safety, performance, accuracy, environment and traceability. KLA P-15 wafer testing and metrology machine is an important tool for semiconductor device fabrication and is ideal for customers who require highly accurate surface and electrical measurements for precision device testing.