Used KLA / TENCOR P15 #9315026 for sale
URL successfully copied!
Tap to zoom
ID: 9315026
Surface profiler
Upgraded PC: Pentium 4
LCD Monitor, 19"
Keyboard and mouse
SSD Hard Disk Drive (HDD)
L-Stylus: 2 um/60
Operating system: Windows XP
Operation manual.
KLA / TENCOR P15 is a high-end wafer testing and metrology equipment designed to provide high throughput and testing accuracy. It is based on a trinocular imaging system, consisting of one bright field and two dark field cameras, and incorporates an advanced Cassegrain optical unit. This allows for measurement of sub-micron features on wafers with an extremely high level of accuracy and speed. The machine is equipped with a high-quality camera and illumination tool, allowing for a wide range of dynamic range for image capture, in order to accurately resolve sub-micron anomalies on wafers. KLA P-15 also offers outstanding field of view, which allows for a higher level of wafer sampling than other systems. Additionally, the asset is capable of very precise pattern recognition and overlay measurements, and possesses a wide variety of Integrated Measurement Services (IMS) packages that provide enhanced accuracy and flexibility for complex measurements. TENCOR P 15 also contains advanced computing capabilities for rapid image processing and statistical analysis, allowing for in-depth measurement analysis. This includes multi-dimensional and multi-layered image display, as well as areas-of-interest (AOI) analysis. Moreover, the model is able to perform wafer metrology, defect analysis and surface roughness testing, in order to provide a complete understanding and quantification of wafer properties. Finally, P 15 offers hardware tools such as the Stepper Correlometer, Automated Defect Recognition and Generator Packages, Dye Cone Correlometer and Equipment Level Defect Analysis (SLDA) for the rapid analysis of defects. Furthermore, the system offers software capabilities such as Measurement EQ, which is a graphical interface for setting up, monitoring and controlling tests, as well as Graphical Analysis, which provides detailed analysis of results in graphical format. All together, these features allow for a higher level of process control, accuracy and speed than ever before.
There are no reviews yet