Used KLA / TENCOR P16+ #9268287 for sale
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ID: 9268287
Wafer Size: 8"
Profiler, 8"
X, Y Motorized stage
Standard range: Microhead 5 SR
With 2 um stylus
Measurement vertical range: 327 µm
Stylus force: 0.5 ~ 50 mg
Top and side view optics
Objective lens: 4x, 0.12 nA (Standard)
Operating system: Windows XP.
KLA / TENCOR P16+ is an advanced wafer testing and metrology equipment that is used in semiconductor device fabrication. It is designed to provide high throughput and yield optimization through the combination of top-level interferometry, optical 3D measurement systems, and metrology process control. KLA P 16+ uses advanced and integrated interferometry technology to measure a variety of critical wafer attributes such as warpage, parallelism, bow dimensions, flatness, and thickness. It is also capable of determining the position, profile, and depth of microscopic features on the front and backside of the wafer. Additionally, TENCOR P-16+ offers users the ability to measure stack-up and step height through its 4D Metrology Capabilities. KLA P16+ utilizes a high-performance optics module which contains a laser source, lens, and a detector. The system also contains sophisticated electronics that can process the signals received from the detector to obtain accurate and repeatable measurements. The optics are calibrated by the unit to ensure precise operation. The machine's integrated process control capabilities enable users to monitor and optimize the process parameters in real-time. This allows for increased process repeatability from wafer to wafer and run to run, thereby minimizing product variations and process non-uniformities. It is also capable of providing live feedback and detection of potential abnormality of parameters. P 16+ also comes with user-friendly software that provides remote operation and data collection. The software allows for efficient data analysis and reporting of process performance. Furthermore, the tool can be integrated with other standard factory automation systems such as SPC and SECS compatible systems. P-16+ offers users a reliable and high performance wafer testing and metrology solution. Its sophisticated features, integrated process control, data collection and reporting capabilities enable users to ensure greater yield, quality and process repeatability.
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