Used KLA / TENCOR P2 #293676473 for sale
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ID: 293676473
Surface profiler
Step height measurement system
Standard head assembly.
KLA / TENCOR P2 is a modular wafer testing and metrology equipment, built specifically for the semiconductor manufacturing industry. The system is designed to provide accurate and repeatable measurements of varying parameters on silicon wafers using the latest laser sensing and inspection techniques. The unit has the capability to carry out multiple measurements on individual wafers in a non-contact manner, while preserving the integrity of the wafer. The machine has two main components - the probe head and metrology module. The probe head consists of multiple sensors, CCD cameras and laser sources, combined with proprietary algorithms to detect and measure various features of the wafer, such as thickness, flatness, size, shape, reflectivity and electrical properties. The measurements are made at up to 1 nanometer resolution, and include measurements of the surface profile and warping, the wafer's edge-to-edge uniformity, and any surface defects or contaminations. The metrology module is responsible for processing and managing the data collected by the probe head, and outputting it in a variety of formats. The module is equipped with advanced analysis capabilities, such as hierarchical filtering, statistical analysis and multivariate analysis. It is also capable of accommodating multiple users and allowing them to access and interact with the data in real-time. KLA P-2 tool is designed to be used in a wide variety of research and industrial applications, such as surface metrology, topographical profiling, image-assisted metrology, and wafer inspection. It is a versatile, cost-effective, and reliable platform for validation and characterization of high-precision wafers, as well as for testing and producing quality wafers. As such, it is an indispensable component of the semiconductor manufacturing process.
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