Used KLA / TENCOR 6220 Surfscan #9149402 for sale
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ID: 9149402
Wafer Size: 6"
Wafer surface contamination analyzer, 6"
Unpatterned wafer inspection
Submicron sensitivity detects 0.10 micron particles
3-D views of individual defects
Color coded defct maps
Surface haze detection
Argon 488 30mW laser
Measurement range: 0.01-9999um
Haze sensitivity: 0.02ppm
Currently stored in cleanroom.
KLA / TENCOR 6220 Surfscan is a wafer testing and metrology equipment designed to provide high-resolution surface analysis of semiconductor wafers. With a size range of up to 200mm, the system is a versatile tool for testing, characterizing, and understanding the structure of a semiconductor wafer. At its core, KLA 6220 Surfscan features an advanced automated epifluorescence microscope that provides high-resolution optical imaging for surface topographical view of the semiconductor wafer. It is capable of measuring below-micron-level features with a resolution of better than 1um. Additionally, the unit is equipped with a two-dimensional orthogonal scanning machine that helps with the accurate measuring and characterizing of surface features and metrology. The 6220 consists of two main components: the optics and the controller. The optics is the primary component that allows the individual to capture images of the wafer. It includes component such as the epifluorescence microscope, objecitves, lenses, a beam-splitting mirror, sample focusstage, and fluorescence filters. The optics is capable of measuring and analyzing features from below one-micron level to greater than 10-micron level. The controller is the secondary component of the tool that controls the microscope's capabilities. It includes software designed to analyze and characterize wafer features, and a data acquisition subsystem. The software features advanced image processing algorithms that can identify and analyze surface features with ease. Additionally, it provides a variety of controls such as auto-contrast and brightness settings, as well as manual image overlay functions. Furthermore, it also includes a comprehensive on-board diagnostics program. TENCOR 6220 Surfscan is the ideal tool for those who need a reliable and accurate surface analysis of a semiconductor wafer. It allows users to observe, measure, and characterize features on a granular level, with the support of its quick and intuitive software. Ultimately, this asset allows users to quickly and accurately study the structure of a semiconductor wafer, leading to greater optimization of processes and product yields.
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