Used KLA / TENCOR FT-600 #178694 for sale

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ID: 178694
Vintage: 1991
Film Thickness Measurement System Power: 115 Volts, 50/60 Hz, 1500 Watts Microscope includes five reflected-light Olympus objectives: - MS Plan 2.5X/0.07, 5X/0.13, 10X/0.30 and 20X/0.46 - ULWD MS Plan 50X/0.55 Includes cassette-to-cassette (C2C) wafer handler with 200mm-wafer trays, PC controller 1991 vintage.
KLA / TENCOR FT-600 is an advanced wafer testing and metrology equipment designed for inspecting semiconductor wafers during the manufacturing process. This system combines high-speed measurements, advanced defect management, and robust process control in one platform, enabling the inspection of both single-die and wafer-level defects. KLA FT-600 offers a series of measurements, such as non-destructive optical metrology, electrical parametric testing, and visual imaging. The unit also offers various die-level and wafer-level measurements, including non-contact topographic measurement accuracy of one-nanometer or better, feature size algorithmic-based measurement capabilities and detailed 3D imaging of up to eight layers. With this advanced machine, users can quickly and accurately measure parameters such as thickness, profile, uniformity, step height, pitch, and boundary shape. The tool features a user-friendly interface, allowing operators to quickly learn the asset and optimize their workflow. TENCOR FT-600 also offers advanced defect management capabilities, such as up to 100 active defects per wafer, operator notifications, positional accuracy of less than one-micron, and integrated laser marker control. FT-600 also offers robust process control and traceability, with a real-time display of process-monitoring and feedback data on each wafer. KLA / TENCOR FT-600 offers a variety of features, such as a configurable automation programming language, an advanced switch matrix for fast testing and verification, and a library of stored data for future reference. Additionally, the model is equipped with four discrete dies per wafer inspection, allowing users to confirm die characteristics across the entire wafer with a single probe. KLA FT-600 also offers comprehensive control of the surround environment, allowing precise process control and handling of highly sensitive wafers. TENCOR FT-600 equipment is an advanced, highly precise and efficient wafer testing and metrology system for precise characterization and monitoring of semiconductor processing. This unit offers a wide variety of capabilities, such as non-destructive optical metrology, electrical parametric testing, visual imaging, defect management, and process control. With its robust features, users can quickly and accurately inspect wafers and optimize their process flows.
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