Used KLA / TENCOR Puma 9000 #293603934 for sale
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ID: 293603934
Vintage: 2005
Darkfield inspection system
M/N: KLA-PUMA9000D-IS
User interface
Power rack
Blower
RCS
EFEM
Light curtain
2005 vintage.
KLA / TENCOR Puma 9000 is a wafer testing and metrology equipment for precise measurements of integrated semiconductor devices. It is designed to improve quality and productivity in the semiconductor industry and provide precise measurement capabilities for process control, product development, and manufacturing ramps. KLA Puma 9000 utilizes advanced optical and vibration sensing technology to quickly take precise measurements and accurately identify any signs of defects. The system features a high-resolution imaging unit to detect and evaluate critical features, including both common and advanced dimensions, misalignment, and pattern defects. In addition, the machine includes a powerful pattern recognition software to identify common defects, as well as a powerful statistical analysis module to provide actionable performance data. The tool also features 3D advanced overlay compensation and measurement to improve defect detection and alignment accuracy, enabling the device under test (DUT) to be metrologized. It also offers an advanced wafer-edge detection asset that can detect non-standard defect sections, even under demanding test conditions. TENCOR Puma 9000 is designed for long-term stability and accuracy, ensuring that data can be collected and analyzed reliably over time. Moreover, the model is designed for easy use, with an intuitive user interface, remote operation capabilities, and multiple automation levels to ease the user's workload. It can be used in both R&D and production environments, and offers versatility in wafer sizes and part types. The equipment also incorporates a comprehensive library of wafer models and identification methods, enabling quick reconfigurations when needed. Overall, Puma 9000 is a high-precision wafer testing and metrology system, offering excellent performance and reliability. With its cutting-edge optical and vibration sensing technology and comprehensive library of wafer models and part identification methods, it provides a comprehensive solution for every semiconductor manufacturer's needs. The unit is designed for ease of use and offers remote operation capabilities, making it not only fast and reliable but also user-friendly.
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