Used KLA / TENCOR Puma 9000 #81748 for sale
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ID: 81748
Wafer Size: 12"
Vintage: 2004
Darkfield Defect Inspection Tool, 12"
Main Computer: DELL Power Edge 2600, 2x Intel Xeon CPU 2,8 GHz, 2GB RAM, Bus Speed 533
MHz, L2 cache: 512 kB
Image PC: Mercury, SN: Z2111
(Qty 2) 12" loadports Asyst 300FL, S3 STD, KT07
Wafer ID reader "Cognex 1701"
Main Power Input: 208V, 3ph,
12" robot with one endeffector (fork)
Subequipment: Blower (KLA-Tencor)
Disk-Management: Array: PERC 4/Di
Disk 0: 546 GB
C: 20 GB, D: 50 GB, E: 426 GB, Z: 50 GB
Main Computer: Windows 2000 Server Family, 5.00.2195, SP4, BIOS Rev. A10
Application: Ver 9.1.703_2, 14. Q4 2007
Last Software upgrade from 9.1.424 to 9.1.703 on 15. Q1 2008
Cougar 9.1.703, 14.Nov 2007
Wafer Inspector V.9.1.703_2
CE Marked
2004 vintage.
KLA / TENCOR Puma 9000 is an advanced wafer testing and metrology equipment. It combines high speed optical, x-ray, wafer broadcast and defect review capabilities in a unique, production-proven platform. KLA Puma 9000 offers the best performance and value in every metrology application, from rapid, non-contact inspection of critical dimension structures to defect review of process sensitive patterns. TENCOR Puma 9000 was designed to provide wafer manufacturers with the highest resolution images, faster throughput and performance to quickly detect subtle defects. Puma 9000 gives users the advanced tools they need to inspect the most difficult advanced node design rules. The system's 5-QX x-ray detector uses up to eight lasers for high accuracy CD measurements, and has the fastest full-wafer broadcast speed in the industry. It also features a dual wavelength configuration for unparalleled x-ray and CDS measurements. KLA / TENCOR Puma 9000 offers the industry's highest resolution digital imaging unit, with pixel sizes as small as three microns. The machine's advanced image processing algorithms allow it to detect and analyze extremely small features with the highest precision. Its automated defect review features eliminate the need for manual viewing and simplify the process for quickly identifying defects. With its enhanced line-matching algorithms and advanced line positioning/tracking capabilities, KLA Puma 9000 ensures the highest metrology accuracy. TENCOR Puma 9000 also offers the latest in automation and connectivity, allowing users to control the tool through automated scripts and data collection tools. It includes optional bar code label readers and automated wafer handling systems that further enhance its performance and flexibility. Additionally, Puma 9000's Ethernet/IP and USB ports make it easy to interface with external systems. KLA / TENCOR Puma 9000 offers a wide range of features to meet the varied needs of the industry. Its flexible design and advanced functionality provide customers with the highest performance and best value available in metrology and testing applications.
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