Used KLA / TENCOR Puma 9000 #9232234 for sale
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KLA / TENCOR Puma 9000 is a wafer testing and metrology platform designed to quickly, accurately, and reliably measure wafer parameters such as semiconductor device structure, uniformity, and topography. The equipment utilizes advanced scanning electron microscope (SEM) imaging, automated optical inspection (AOI), and laser interferometry (LI) tools to produce comprehensive data sets that detail the performance of individual devices on the wafer. It is ideal for measuring multiple features at the same time and has the potential to reduce the time required to analyze wafers without compromising accuracy or reliability. KLA Puma 9000 is designed to adapt to a variety of conditions, making it ideal for environments with high or low temperature, or where dust and debris are present. It is capable of analyzing wafers up to 8-inch in diameter and has an excellent dynamic range for high detail images and feature analysis. The platform combines a variety of sensors and integrated electronics to detect structural characteristics such as throat depth, pitch, line width, line angle, defect type, and more. The system utilizes advanced algorithms to accurately classify features and extract data including total defect area, defect density, average width, pitch, and many other parameters to provide a fast and reliable integrated data solution. In addition, the unit is equipped with superior automation capabilities. It uses an embedded particle inspection machine and flat panel detector to scan wafers in a completely automated fashion and can be configured to either individually inspect specific structures or coordinate a large ensemble of data capture and analysis points for large-scale analysis needs. TENCOR Puma 9000 includes software-controlled mechanical stages for sample positioning and is available with an option for high-precision alignment for excellent accuracy. Finally, it includes automated shielding to ensure reliable data collection and can be equipped with a built-in ion-beam source or fiber-optic connections for integration into existing platforms. Puma 9000 is the perfect solution for wafer testing and metrology tasks. The platform combines scanning electron microscopes, automated optical inspection, and laser interferometry technologies in one package to provide unprecedented data accuracy, reliability, and speed. Its automation features and software controlled mechanical stages allow for accurate and repeatable measurements of multiple features without operator intervention. The tool is designed to withstand harsh environmental conditions and is capable of scanning wafers of up to 8-inches in diameter. In summary, KLA / TENCOR Puma 9000 is the leading wafer testing and metrology solution.
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