Used KLA / TENCOR Puma 9000D #9184157 for sale
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ID: 9184157
Wafer Size: 12"
Vintage: 2006
Inspection system, 12"
Tool with (2) modules
Light source:UV laser
Laser wavelength:365nm
(2) Dark field Sensor
Select Mode:sL10,sL15,sL20,sL40,sL60,sL70
Currently stored in cleanroom
2006 vintage.
KLA / TENCOR Puma 9000D is a wafer testing and metrology equipment that provides unmatched accuracy and throughput capabilities to ensure the highest quality yield and yields. This system combines advanced wafer inspection with automated metrology to identify and measure any defects present on the wafer. KLA Puma 9000D delivers unsurpassed accuracy and speed to identify and measure extremely small defects on today's high-density wafers. TENCOR PUMA 9000 D's automated metrology unit accurately and quickly measures features over a wide wafer area, ranging from 1µm to 5µm features at speeds up to 2µm/second. It also measures a wide range of features on the wafer surface, including CDs, linear pitch and line widths, steps, and protrusion heights. In terms of imaging, PUMA 9000 D offers high-definition imaging capabilities with a large field of view to help provide insight into each defects stature and verify measurement accuracy. It has an optional multiple vision mode feature that offers 480 images per second for a large field of view. Its advanced image processing algorithms accurately detect and measure wafer defects including scratches, particles, and dislocations in unprecedented detail. The machine's high-precision linear stage also offers a reference level of precision. Its high-precision drive technology provides micron-level precision, allowing for extremely accurate measurements. And with its Air Scanning Module, KLA PUMA 9000 D provides a full range of inspection capabilities for today's smallest devices. In addition, its open architecture and modular design allow for easy and cost-effective customization and upgrades to the tool. Built-in autofocus capabilities and automated wafer loading and tracking minimizes operator skill requirements and allows the asset to be quickly integrated into a production line. To ensure the highest quality results, Puma 9000D provides comprehensive and intuitive operator control and reporting features. This includes an automated defect reporting model that creates a report of each defect and its location within the wafer pattern. It also offers Global Defect Control options for integrated and simplified process control. TENCOR Puma 9000D delivers unprecedented accuracy and speed that are essential for meeting today's production requirements. With its cutting-edge wafer testing and metrology technology, KLA / TENCOR PUMA 9000 D provides an efficient solution for ensuring high-yield, high-quality wafers.
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